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LSMV-060F25H-G1 Optical Communication Panel
0190-40067 CABLE ASSY RF MATCH TO ESC
0190-40068 C/A ESC P.S. TO CHAMBER BIAS RF 10' W/
0190-40074 CH D MULTIPLEXED I/O C0NTROL BOARD
0190-40078 RF CBLE SOURCE GENERATOR
0190-40080 RF CABLE BIAS GENERATOR
0190-40086 CARDSBC W/MEZ33 MHZ 16 MBYTE V36-AMAT
0190-40129 CABLE ASSYE-CHUCKTO CH. 20FT. QDS
0190-40132 CABLE ASSYSQ-SQRF MTCH-CHMBR10FTTEFL
0190-40134 CABLE ASSYHN/QDS RF MTCH/E-CHCK PS10F
0190-40135 ADAPTER CURRENT MONITOR QC(F)-QC(F)
0190-70003 CABLE ASSY BLADE VAC
0190-70044 VALVE SOL 1/16" ORIFICE W/CONN 6" (SPEC CONTROL)
0190-70052 STEPPING MOTOR DRIVE PRINTED CIRCUIT ASS
0190-70059 PURCH SPEC 45FT NUDE ION GAUGE CABLE
0190-70060 MAGNET DRIVE ASSY
0190-70066 FANTRAY 300CFM19"X1.75" X8"115VAC REPL0
0190-70070 BRG BALL .312 ID .688 OD FLGD SHLD SST LVPGREASE
0190-70075 BRG BALL 1.0 BORE 1.375O.D. 3/32" BALLS LVP GREASE
0190-70076 BRG BALL 1/8"6.00 BORE 6.50 O.D. LVP GREASE
0190-70080 POWER SUPPLY RF 13.56 MHZ 1250 W (2 ea for 2 Chamber)
0190-70103 PCB ASSY ANALOG MONITOR LIGHT PEN
0190-70120 BRG..1875 ID X .500 OD DBL SHLD
0190-75043 XFMR ASSY 3KVC PRI 480200208200V
0190-75044 XFMR ASSY 5KVC PRI 208 200V SEC 120 100V
0190-75045 XFMR ASSY 3KVI 480V SEC 200/120V 50/60HZ
0190-75071 FILTER 2 1/2IN DIA-WASHABLE ALUMINUM RUST FREE
0190-75073 BALL SCREW ASSY LEFT HAND SPEC CONTROLLED
0190-75079 BLOWER 480V +/-10% 3PH 50HZ
0190-76005 SPEC CNTL DWG INTELLIGENT MOTOR CONTROLLER (OBS replaced by 0190-09939)
0190-76016 PNEUMATIC MANIFOLD CENTURA MAINFRAME
0190-76028 GEN RF 1250W 13.56MHZ 200/208VAC 3PHASE
0190-76030 DUAL RF PWR SUPPLY
0190-76043 OBS. PCBA ASSY SBC SYNERGY 68040 CONTROLLER WIT
0190-76167 PCB 60E W/PNEU MANIFOLD
0190-76172 BLOWER 480 VOLT +/-10% 3PH 60HZ
0190-76198 WATER FLOW SWITCH SST 5.5 GPM
0190-76204 MANIFOLD LOW PRESSURE PNEUMATICS
0190-76205 MANIFOLD HIGH PRESSURE PNEUMATICS
0190-76252 CDN 294 TO A.M. SPEC.
0190-76445 CABLE
0195-01158 EPI FEATURE PROTECTION KEY ASSY FLO-ZON
0200-00025 GAS RING 100-200MM MLR S
0200-00071 INSULATING PIPEQUARTZ 200MMEXT
0200-00135 BLADE QUARTZ 200MM HP/HP+ WRIST ANTI-SPIN
0200-00207 TIPSUSCEPTOR SHAFTOUTSIDE
0200-00242 DEPOSITION RING WITH ANTI-ROTATION CU BE
0200-00289 CYLINDER WAFER SUPPORT 200MM RTP QUARTZ
0200-00330 RINGSINGLECERAMIC ESC200MM JMFLOW QU
0200-00412 SHAFT SUSCEPTOR W/ RMVBL PINS NO CEN EPI
0200-00539 DOME UPPER 200MM PRE-CLEAN
0200-00677 SHADOW RINGQUARTZ200MM FLATOD 63 FINI
0200-03486 PIN LOCKING CHAMBER LOWER LINER 200MM & 300MM EPI
0200-05207 DOME LOWER QTZ LOW STRESS
0200-09002 WINDOW SLIT CVD CHAMBER
0200-09005 WINDOW QUARTZ
0200-09021 SHIELD 150MM
0200-09025 TUBE GAS FEED
0200-09072 SHIELD 200MM
0200-09074 WINDOW HTR 200MM
0200-09083 SHIELD 150MM SPUTTER
0200-09087 QTZ RING 150MM SPUTTER
0200-09121 SHIELD 456 BW
0200-09129 ISOLATOR 200MM WB
0200-09135 ADAPTER PUMPING PLATE 150MM
0200-09179 INSULATING PIPEQTZ
0200-09182 ADAPTER PUMPING PLATE 200MM
0200-09319 RING OUTER 150MM SHADOW RING BWCVD