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LSMV-060F25H-G1 Input/Output Board
0100-35118 ASSYMETCH CHAMBER INTERFACE
0100-35124 PCBSERIPLEX I/O DISTRIBUTION
0100-35126 PCB ASSEMBLY INCOMPATIBLE GAS LOCKOUT
0100-35148 PCBA TWO CHBR GAS BACKPLANE
0100-35173 PCBSERIPLEX POWER DISTRIBUTION
0100-35174 CENTURA APC MATRIX BOARD
0100-35175 PCB ASSY RTP CHAMBER INTERFACE
0100-35180 PCB SYSTEM DISTRIBUTION BOARD DPA
0100-35192 ASSEMBLY PCB DPS MAINTENANCE CONTROL
0100-35212 PCBA CHAMBER A/C TRAY IPS 5200 MCC
0100-35213 PCBA CHAMBER B/D TRAY IPS 5200 MCC
0100-35230 PCBATC AMP/INTERLOCK
0100-35231 PCBSERIPLEX I/O DISTRIBUTION GPLIS
0100-35263 ASSY PCB AC DIST
0100-35265 ASSYPCBTC AMP INTERLOCK DXZ
0100-35280 I/O DISTRIBUTION PCB
0100-35337 ASSYPCB SPILL SENSOR G-PLIS
0100-35353 PCB ASSY 5 PHASE STEPPER DRIVER INTERFACE
0100-36408
0100-38000 PCB ASSYREACTIVE GAS INTERLOCK
0100-38032 PCBA ESC CONTROLLER CERAMIC
0100-38033 ASSY PCV CHAMBER SET INTERFACE
0100-38036 ASSY PCB CHAMBER SET SERIPLEX BACKLANE
0100-40004 wPCBA PERSONALITY
0100-40012 PCBA BACKPLANE FUSE STATUS BD
0100-40013 PCBA MF INTERLOCK
0100-40022 PCBA APC GAS INTERLOCK
0100-40024 wPCBALOADLOCK INTERCONNECT BD.
0100-40025 PCBA MAINFRAME INTERCONNECT BD.
0100-40027 PCBATWO CHMBR BACKPLANE
0100-40028 wPCBA TWO CHAMBER GAS BACKPLANE
0100-40031 PCBA AC 3 PHASE VOLTAGE SENSE
0100-40033 PCBAE-CHUCK PWR SUPPLY
0100-40039 PCB ASSY HIGH DEN PLASMA CH. BD.
0100-40044 wPCBAREMOTE CHAMBER INTERFACE
0100-40051 ASSEMBLYPCB ADAPTER BACKPLANE
0100-70015 ASSY GATE VALVE INTERCONNECT PCB
0100-70019 ASSY CONTROLLER DISTRIB. /WPS BO
0100-70020 ASSY VERSION 4 SIGNAL LAMP PCB
0100-70028 ASSY ROBOT INTERCONNECT PCB
0100-75548 ASSY PCB CHAMBER DIO PACKPLANE
0100-76004 OBS PCB ASSY CENTERFINDER CONTROL REPLACED BY 0100-76042
0100-76005 OBS PCB ASSY SERIAL/VIDEO/DCN DISTRIBUTION
0100-76017 OBS:PCB ASSY INTERFACE PROCESSOR DISTRIBUTION
0100-76029 PCB CHBR TRAY INTC A & C CENTURA MCVD
0100-76038 ASSY PCB LED-NB FAST WAFER MAPPING
0100-76042 ASSY PCB EWOB AND OTF/CENTERFINDER
0100-76050 ASSY PCB CONTROLLER I/O
0100-76053 ASSY ROBOT INTERCONNECT PCB
0100-76055 PCBA CENTERFINDER INTERFACE
0100-76061 ASSY PCB SYSTEM ELECTRONICS BACKPLANE
0100-76065 PCBA INTERCONNECT ASSY
0100-76083 OBS:PCB SERIAL/VIDEO/SERIPLEX DIST
0100-76088 PCB ASSY CENTERFINDER 568 IN SHORT PR
0100-76124 DIGITAL INPUT OUTPUT PCB
0100-76181 PCB ASSY 5000 WIRING DISTRIBUTION BOAR
0100-76182 PCB ASSY CONTROLLER I/O
0100-76295 OBS ASSEMBLY PCB I/O EXPANSION
0100-77011 PCB ASSY LIGHT TOWER RELAY CMP CONTROL
0100-77042 PCB ASSY PENTIUM INTERFACE
0100-94052 PWBA INDEX CONTROL
010J-50009
0110-35054 PCB FAB CHAMBER INTERFACE
0110-35086 PCB GAS PANEL DISTRIBUTION FAB
0120-20067 PCB A/W STEPPER CONTROLLER
0123-5481
0130-76061 SYSTEM ELECTRONICS BACKPLANE