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LSMV-060F25H-G1 Analog Input Panel

0100-18035 PCBAPLASMA DETECTULTIMA CLEAN
0100-18040 PCBACHAMBER TRAY ULTIMAPOSITION A/C
0100-18043 ASSEMBLY PCB REMOTE SERIPLEX I/O HDP-CV
0100-18058 PCB ASSY. TC AMP INTERLOCK ULTIMA
0100-18062 PCB ASSYCHAMBER TRAY ULTIMA
0100-18064 PCB ASSEMBLYCHAMBER TRAY ULTIMA POS A/C
0100-18065 PCB ASSEMBLYCHAMBER TRAY ULTIMA POS B/D
0100-20000 PCB ASSY 64 CHANNEL MUX
0100-20001 PCB ASSY SYSTEM ELECTRONICS INTERFACE
0100-20003 OBS DIGITAL INPUT OUTPUT PCB
0100-20004 PCB ASSY CHAMBER INTERCONNECT
0100-20012 PCB ASSY ISOLATION AMPLIFIER
0100-20027 PCB ASSY CONTACTOR INTERLOCK
0100-20040 PCB ASSY REMOTE SUPPLY DISTRIBUTION
0100-20051 PCB ASSY TURBO INTERCONNECT
0100-20063 PCB ASSY TC GAUGE
0100-20064 PCB ASSY SBC I/O BREAKOUT
0100-20066 PCB ASSY ANALOG SYNC DETECT
0100-20067 OBS: PCB ASSY STEPPER CONTROLLER
0100-20069 OBSPCB WAFER ORIENTER
0100-20070 PCB ASSY MAG/LAMP DIST.
0100-20073 PCB ASSY WAFER DETECTOR
0100-20086 PCB ASSY WAFER MAP LED
0100-20100 PCB ASSY ANALOG INPUT/OUTPUT
0100-20162 OBS: PCB ASSY STEPPERCONTROLLER
0100-20164 PCB ASSYCONT POWER DIST
0100-20173 ASSY.PCB STEPPER CONTROLLER 1.7 AMP DRIVER
0100-20177 PCB ASSY WATER/SMOKE DET CENT PVD
0100-20180 PCB ASSY PVD DRIVER CENTURA
0100-20181 PCB ASSY OPERATOR CONTROL PANEL WITH INT SWITCH
0100-20192 PCB ASSY 486PC RS232 DISTRIBUTION
0100-20204 PCB ASSY SYS ELEC INTFC W/SEL ENC CLK
0100-20231 PCB INTERLOCK SELECT
0100-20232 PCB GEN RACK EXPANSION BACKPLANE
0100-20234 PCB ASSYSERIAL/VIDEO INTERCONNECT
0100-20358 PCB ASSY. MOTOR DRIVER DIST.
0100-20458 ASSEMBLY PCBCONFIGURABLE INTERLOCK
0100-35011 ASSY PCB CENTERFINDER SENDER
0100-35012 ASSY PCB CENTERFINDER RECEIVER BD.
0100-35024 ASSY PCB CENTERFINDER SBC
0100-35026 ASSY CONTROLLER I/O
0100-35028 ASSY PCB VIDEO SERIAL INTERCONNECT
0100-35030 ASSY PCB CHAMBER INTERFACE
0100-35034 PCB ASSY STEPPER DRIVER PWR DISTR
0100-35036 PCB ASSY DUAL GAS LEAK DET
0100-35049 ASSY PCB SYS RESET/INTLK SEL
0100-35050 ASSY CONTROLLER I/O CENTURA
0100-35051 REPLACED BY 0100-35101
0100-35053 PCB ASSY MAINFRAME INTERLOCKS
0100-35054 PCB ASSY CHAMBER INTERFACE
0100-35058 ASSY PCBLOADLOCK INTERLOCKS
0100-35060 ASSY PCB CHAMBER POWER DISTRIBUTION
0100-35062 ASSY PCB RELAY INTERFACE - 4 CHAMBERS - OBS
0100-35063 ASSY PCB REMOTE MAIN RLY
0100-35065 PCB ASSY SERIAL ISOLATOR
0100-35066 PCB ASSEMBLY CHAMBER PNEUMATIC INTERCONNECT BD
0100-35067 ASSYPCB MAINFRAME PNEUMATICS INTERCONNECT
0100-35071 ASSYPCB GAS PANEL DISTRIBUTION
0100-35079 ASSYPCBH2 DETECT
0100-35080 ASSY PCB BLOWER/CHMBR RELAY INTFC
0100-35082 PCB ASSY CHAMBER INTERCONNECT A&C CENTURA MXP
0100-35083 PCB ASSY CHAMBER INTERCONNECT B/D CENTURA MXP
0100-35086 PCB ASSEMBLY GAS PANEL DISTRIBUTION
0100-35101 OBSPCB ASSY SYSTEM ELECTRONICS
0100-35102 PCB ASSY STEC MFC ADAPTOR METCH MXP
0100-35107 ASSY PCB GAS PANEL DISTRB. METCH CENTURA
0100-35116 ASSYCHAMBER INTERCONNECTPOS A-C METCH CENTURA