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GE輪機備件    L42928G01
0040-00557 SIDE SHIELD 2
0040-00558 SIDE SHIELD 3
0040-00559 SIDE SHIELD 4
0040-00560 REAR SHIELD
0040-01046 SHIELD THERMAL DPA RIGHT SIDE
0040-01075 BASE CONNECTOR HEATER
0040-01134 MOUNTING RING DOME 200MM DPS E-DTCU
0040-01239 BASEHEATERGIGA-FILL SACVD
0040-01543
0040-01549 COVER 8" PEDESTAL B101 HTR S-IMP SST
0040-01557 FRONT PANEL W/SIGNAL NBLL CENTURA
0040-01892 LEFT BLOCK CLAMP/GAS SPRING DXZ FL GE
0040-02149 HEATER COMMON 8" LONG SHAFT ALN - HA12
0040-02194 METAL COVER PUMPING PLATE W GAS SPR DX
0040-02408 SHAFT COOLING TUBE ALUM XZZ COMMON HT
0040-02549 ESC ASSY150MM FLAT DUAL ZONESUPER-E
0040-02818 BLOCK MIXING LID GIGA-FILL SACVD
0040-03411 MOUNTING PLATE SIGMA THROTTLE VALVE
0040-03713 RINGMOUNTINGDOMEES DTCUPOLY DPS
0040-03733 COVER ORIENTER/DEGAS
0040-03897 PLATE LID NI PLATED TIC14 TI 200MM
0040-04024 PART
0040-04542 HEATER WELDMENT 200MM CPR STD CHUCK WXZ
0040-04697
0040-04977 LID CHAMBER TANOX HEATED FEEDTHROUGH
0040-05489
0040-05652 COVER MOTOR PLATE GUARD
0040-05881 COVER RF WATER BOX SUB-ZERO ESC 1.574" S
0040-05965 PLATE 5 PHASE MOTOR WXZ
0040-06241 HTR
0040-06460 WATLOW BLANKOFF PANEL
0040-06477 CLAMP RING UPPER RP
0040-06711 ESC ANTI-LIFT BRACKET
0040-06741 BRACKETVAT CONTROLLER TO PUMP
0040-09002 CHAMBER ETCH
0040-09004 BELLOWS WELDMENT
0040-09008 FRAME VAC PORT/SLIT WIN
0040-09009 BASE LAMP VENT
0040-09022 HOUSING
0040-09036 SUPPORT BUS BAR
0040-09037 BLADE 125MM/150MM
0040-09065 COVER PLATE
0040-09069 CABLE ASSEMBLY
0040-09094 CHAMBER 200MM
0040-09095 GAS BOX 200MM
0040-09096 VACPORT/SLIT WDW/HINGE SUPPORT-THNGSTEN
0040-09098 BLADE 200MM
0040-09136 CHAMBER BW
0040-09140 ENCL. CAP MANOMETER BRD BW
0040-09221 CHAMBER 200MM SACVD
0040-09238 SHIELD FRONT
0040-09259 ?
0040-09260 GAS BOX 100MM/200MM WSJ
0040-09263 PLATE PERF 200MM WSI
0040-09264 PLATE COVER EXPANDED RS-232 INTERCONNE
0040-09271 BRACKET BASE WAFER LIFT
0040-09312 CYLINDER CLAMPING 200MM HEWEB
0040-09480 CVD PART
0040-09546 SLIDE FRONT SHIELD UNIVERSAL
0040-09547 SHIELD SIDEUNIVERSAL
0040-09548 COVERWINDOW SIDE SHIELD UPPER UNIVERSA
0040-09549 SHIELD REAR UNIVERSAL
0040-09560 COVERWINDOWSIDE SHIELD LOWER UNIVERSA
0040-09659 SHIELD FRONT SERVICABLE UNIVERSAL
0040-09675 BASEESC
0040-09689 ELBOW ROUGHING LINE
0040-09694 SHIELD FRONT SERVICABLE UNIVERSAL