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GE輪機備件    L51094G01
0020-30679 CYLINDER CLAMPING POLY/WSI 150MM
0020-30681 MANIFOLD INPUT SACVD
0020-30701 INSERT POLYSULFONE OX/MLR/NIT 150MM
0020-30707 COVER ELECTRICAL H20 VDSII
0020-30797 PERF PLATE COMMON SILANE 200MM
0020-30918 TOOL CENTERING 200MM SUS/ HOOP BSE BWCVD
0020-30983 PLATE TOP CHMBR PRSP
0020-31016 HOUSING Quartz Tube BWCVD
0020-31017 BUSHING Terminal BWCVD
0020-31035 MANIFOLD Input BWCVD
0020-31147 INSERT BASE ALUM 150/200MM FLAT
0020-31155 MANIFOLD Gas WSi
0020-31159 PLATE BLANKOFF FEEDTHRU PRSP3
0020-31205 PLATE BLOCKER 45&6" BWCVD 185 THK
0020-31281 HINGE CVD 8" CHAMBER
0020-31283 HINGE WCVD
0020-31376 FLANGE BASE UNIBODY ETCH CHAMBER
0020-31388 CLINDER FLOW THRU 4-6"
0020-31407 BRACKET AC CONNECTOR UNIVERSAL COVER
0020-31423 CLAMP SWITCH ETCH UNIBO
0020-31425 MIXER GAS BOX LID BWCVD
0020-31445 BAR UPPER LEFT DOOR HINGE
0020-31466 PUMPING PLATE DELTA NIT 150MM
0020-31488 GAS DISTRIBUTION PLATE13 HOLES
0020-31490 GAS DISTRIBUTION PLATE 37 HOLES
0020-31492 GAS DISTRIBUTION PLATE 101 HOLES
0020-31509 PEDESTAL RIMLESS OX/MLR/NIT 200MM NO
0020-31530 HSG THROTTLE VALVE UNIVERSAL CHAMBER
0020-31532 HINGE UNIVERSAL CHAMBER
0020-31553 COVERCLEARRF GEN CB BOX
0020-31558 PLATE RF BOX ESC
0020-31564 RODCATHODEESC
0020-31572 PLATE BLOCKER 8" WSI
0020-31600 SHIELD PROTECTIVE UNIBODY COVER
0020-31609 COVER RF SHIELD INTERLOCK DELTA SACVD ALUM
0020-31613 CYLINDERLIFTALUM150MM
0020-31619 STRAPCONNECTING150MM CERAMIC
0020-31626 FLANGEINSULATINGESC
0020-31627 FLANGEBASE ESC
0020-31656 RINGCLAMPINGPOLY150MMEXT CATHODE
0020-31659 COVER VESPEL
0020-31660 BRKTSYMMETRICAL COIL TOP
0020-31661 BRKT SYMMETRICAL COIL SIDE
0020-31662 BRKTCLAMPUNIVERSAL SYMMETRICAL COIL
0020-31676 PLATE SENSOR WAFER POSITION SENSOR
0020-31689 CLAMPCLEAN SERVICEABLE GATE VALVE
0020-31691 CENTERING RING GATE VALVE
0020-31692 FTG ELBOW GAS SUPPLY UNIBODY
0020-31698 RING ADAPTER
0020-31709 PEDESTAL OX/MLR/NIT 150MM FLAT
0020-31747 PLATE HANDLE BASE LOADLOCK COVER
0020-31751
0020-31774 CYLINDER HOT INNER
0020-31823 BRACKETRECESSED ENDPOINT
0020-31830 PLATEADAPTER ETCH CHAMBER TOP COVER
0020-31831 PLATE ETCH CHAMBER TOP COVER
0020-31886 FLANGE INSULATION UNIBODY ETCH
0020-32036 PLATE BLOCKER .100SX UNIVERSAL CHAMBER
0020-32047 POST LOWER 2 PC EXT PEDESTAL LIFT E
0020-32048 POST UPPER 2PC VESPEL EXT PEDESTAL
0020-32121 RING ADAPTER THROTTLE VALVE
0020-32151 PEDESTAL 200MM NOTCH HV IB SOLID COMP. R
0020-32161 PEDESTAL ESC 200MM NOTCH WEB
0020-32163 COVER BOTTOM PEDESTAL ESC 200MM WEB
0020-32164 LIFT PIN CONDUCTIVE LONG
0020-32175 COVER BOTTOM PEDESTAL ESC 150MM WEB
0020-32312 DOOR SLIT VALVE "S"