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GE輪機備件    J522P10
0010-00847
0010-00865 BAKEOUT LAMP CLAMP ASSEMBLY
0010-01230 ASSEMBLY SOURCE SIP TTN
0010-01365 CORROSION RESISTANT SLT VLV ACTUATOR NON
0010-10033 ASSY WAFER LIFT REV 1 CERAMIC HOOP
0010-10036 ASSY SUSC BB TEOS 200MM SCREWLESS
0010-10045 ASSY PUMP STACK HTR AC OUTLET
0010-10055 ASSYGAS BOXWXZ
0010-10079 ASSYDRIVEWXZ
0010-10082 ASSY THROTTLE VALVEWXZ
0010-10141 ASSY 8-SLOT WAFER POSITION SENSOR RETROREFLECTOR
0010-10143 ASSYAC OUTLET ENCLOSURERING LUG
0010-10197 ASSY. TERM BLOCK TB-3 P-5000 MK2-XT
0010-10204 TESTED PEDESTAL ESC ASSY 150MM 1FL
0010-10245 ASSYDC POWER SUPPLY BOX (24V AT 31A)
0010-10247
0010-10419 ASSY TEOS AMPULE/CHBR VER IVSACVD
0010-10420 ASSY TEOS AMPULE/CHAMBER VERSION IV
0010-10448 ASSEMBLY HINGE R2
0010-10663 ASSEMBLY HOUSING EEP 300MM
0010-10732 PLATE PUMPING
0010-10776 ASSY RFG OUTPUT ADAPTER
0010-10942 8-SLOT LOADLOCK COVER ASSY
0010-10943 15 SLOT LOADLOCK COVER ASSY
0010-10957 ASSY DRIVE FC WXZ P5000 W/VITON
0010-10964 ASSYFAN ROT INTRLK
0010-10973 ASSEMBLY H.O.T. DETECTOR MODULE
0010-10995 ASSEMBLY SOFT PUMP VALVE
0010-13034 MAGNET ASSEMBLY TINY III SIP ENCORE CU
0010-13104 ASSY CASSETTE HANDLER-BOTTOM
0010-13140 ASSY 15-SLOT TRAY 200MM .450SPG
0010-13220
0010-13266 ASSY LINKAGE LEFT HAND HP UPGRADE
0010-13267 ASSY LINKAGERIGHT HAND HP UPGRADE
0010-13320 ASSY ROBOT DRIVE 4" 5" 6"
0010-13321 ASSY ROBOT DRIVE 8"
0010-13445 MONITOR BASE ASSY
0010-13602 OBS-ASSY HIGH EFFICIENCY RF MATCH - BIA
0010-13642 29 POSN STORAGE ELEVATOR
0010-14220 ASSY BODY MODULE CHEMRAZ EMAX DD INTEGRATED ETCH 200MM
0010-14705 CHAMBER ASSY SINGEN 200MM
0010-15104
0010-17776 ALD TAN 200MM LID ASSY
0010-18080 ASSY AIN HEATER 200MM TICL4 TIN W/ TE
0010-18132 ASSYAPPLICATOR RPSC HDP-CVD
0010-18154 ASSEMBLYMW SUPPORT CHAULTIMA HDP-CVD
0010-18247 ASSY ESC POWER SUPPLY ULTIMA HDPCVD
0010-18297 RF INTERLOCK ASSEMBLY HDP-CVD ULTIMA
0010-20030 TRANSFER ROBOT ASSY
0010-20060 SOURCE 5 & 6 ASSY.
0010-20066 PRECLEAN 5"
0010-20079 ASSY PVD CHAMBER DRIVER
0010-20095 ASSY 3.5 MICROFLOPPY 1.4MB
0010-20138 ASSY TC AMP HSNG
0010-20249 ASSYPVD SLIT VALVE DOOR W/'FAT'PARKER O
0010-20278 ASSY 8" DEGAS/ORIENTER CHAMBER 50C
0010-20285 ASSY INDEXER LEFT AUTOMATED LOAD LOCK
0010-20286 ASSY INDEXER RIGHT AUTOMATED LOAD LOCK
0010-20293 ASSY DIFFUSER
0010-20317 ASSY 8" DEGAS LAMP 350C
0010-20399 ASSY CASSETTE CLAMPING 200MM PLASTIC
0010-20406 DETECTOR ASSY LLA  LEFT
0010-20525 ASSY 6" RF MATCH MODIFIED
0010-20664 ASSY SLIT VALVE
0010-20678 MAGNET
0010-20697 ASSY DUAL DEGAS DRIVER 200V
0010-20701 ASSY 2-PHASE DVR ENCLOSURE ASSY