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GE輪機備件    J522P15
0010-09021 ASSY I/O VALVE
0010-09025 ASSY 100MM ROBOT BLADE
0010-09026 ASSY 125MM ROBOT BLADE
0010-09027 ASSY 150MM BLADE
0010-09046 WAFER LIFT
0010-09049 ASSY STORAGE ELEVATOR
0010-09050 ASSY 100MM STORAGE
0010-09051 ASSY 125MM STORAGE
0010-09103 STAND ALONE MONITOR
0010-09104 ASSY OZONATOR AC
0010-09114 ASSY HEAD 5" NITRIDE/OXIDE
0010-09179 ASSY CVD SUSCEPTOR LIFT
0010-09180 WAFER LIFT
0010-09181 ASSY DC POWER SUPPLY BOX (24V AT 31A)
0010-09184 ASSY AC CHANNEL EXPANDED
0010-09191 ASSY AC OUTLET
0010-09224 ROBOT DRIVE ASSY8"INCH 200MM
0010-09237 LAMP MODULE BASIC ASSY
0010-09277 BWNVSI BASIC CHAMBER
0010-09290 ASSY BWCVD LAMP MODULE
0010-09292 ASSY TC AMP HOUSING GENERIC
0010-09297 ASSY 15 VOLT POWER SUPPLY
0010-09299 ASSY 20 SLOT VME CONTROLLER CARD CAGE
0010-09301 THROTTLE VALVE ASSY TEOS
0010-09305 THROTTLE VALVE BASIC TEOS
0010-09316 TEMP CONT ASSY CLOSED LOOPTEOS
0010-09318 ASSY DOPANT AMPULE
0010-09325 ASSY PER CHBR 120VAC POWER DISTRIBUTION
0010-09328 AMPULE ASSY TEOS CLOSED LOOP
0010-09331 AMPULE/CHAMBER ASSY TEOS
0010-09337 LAMP MODULE ASSY 200MM
0010-09341 WAFER LIFT ASSY
0010-09408 ASSY CLAMP CHAMBER SACVD
0010-09411 BWCVD 200MM LAMP MODULE
0010-09415
0010-09416 ASSY RF MATCHETCH
0010-09417
0010-09490 ASSY RF MATCH BW ETCHBACK
0010-75088 ASSY CUST OPT 8" CASS HNDLR W/SOFT SUR
0010-75090 ASSY VGA MONITOR STAND ALONE
0010-09635 DELTA/SACVD GAS BOX
0010-75183 ASSY 2 PHASE STEPPER MOTOR
0010-09656 PEDESTAL ASSY OX/MLR/NIT 200MM NOTCH
0010-75221 12.9" SOURCE ASSY
0010-09750 ASSY CVD RF MATCH (DC BIAS)
0010-75328 ASSY 2 PHASE DRIVER
0010-09822 CHAMBER CLAMP SACVD
0010-09886 ASSY LI REMOTE CONTROLLER
0010-75428 ASSY 8" REFLECTOR CASSETTE HANDLER LLA
0010-09900 PEDESTAL ASSY 150MM EXT CATHODE
0010-75441 ASSY HANDLER RIGHT W/DUMMY LLB
0010-75451 ASSY 150MM CASS CLAMPING
0010-09918 ASSY 8" DELTA NITRIDE THROTTLE VALVE
0010-09929 MAIN PLATR ASSY ENDPOINT
0010-09933 HV MODULE ASSY ESC
0010-09934 PLATE RF BOX ASSY ESC
0010-09935 MONOCHROMATOR MODULE ASSY ENDPOINT
0010-75533 ASSY HDP EXTENDED ROBOT
0010-00038 BRACKET AC JUNCTION ASSY
0010-00304 GRIPPER ASSY l25MM
0010-00510 ASSEMBLY BEARING
0010-00546 PORT ASSEMBLY
0010-00684 ETCH CHAMBER ASSEMBLY
0010-00685 ACTUATOR ASSY STD CATHODE
0010-00750 COVER ASSY TOP BOLT DOWN ETCH CHMBR
0010-00833 PEDESTAL ASSY BOT 150MM OXIDE
0010-00834 PEDESTAL ASSY 150MM OXIDE